IP Library › Granted Patent US 6,699,372
Granted Patent Utility
US 6,699,372 · Confirmation No. 8786

METHOD OF COIL PREPARATION FOR IONIZED METAL PLASMA PROCESS AND METHOD OF MANUFACTURING INTEGRATED CIRCUITS

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2014-07-29 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2014-07-28 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-08-15 LET. Miscellaneous Incoming Letter 1 View
2003-08-15 DRW Drawings-only black and white line drawings 4 View
2001-04-16 TRNA Transmittal of New Application 2 View
2001-04-16 SPEC Specification 24 View
2001-04-16 CLM Claims 9 View
2001-04-16 ABST Abstract 1 View
2001-04-16 DRW Drawings-only black and white line drawings 6 View
2001-04-16 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,699,372
App. No.
09/836,365
Filed
2001-04-16
Granted
2004-03-02
Pub. No.
US20020189932A1
Art Unit
1753
PTA
-120 days