Granted Patent
Utility
US 6,541,167
· Confirmation No. 4391
OPTICAL PROXIMITY CORRECTION
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-01-28 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-11-15 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 7 | View | |
| 2002-11-15 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2001-11-06 | FOR |
Foreign Reference | 49 | View | |
| 2001-11-06 | FOR |
Foreign Reference | 30 | View | |
| 2001-08-14 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2001-08-14 | OATH |
Oath or Declaration filed | 3 | View | |
| 2001-06-15 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2001-04-24 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-04-24 | SPEC |
Specification | 30 | View | |
| 2001-04-24 | CLM |
Claims | 3 | View | |
| 2001-04-24 | ABST |
Abstract | 1 | View | |
| 2001-04-24 | DRW |
Drawings-only black and white line drawings | 34 | View | |
| 2001-04-24 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2001-04-24 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-04-24 | SPEC |
Specification | 30 | View | |
| 2001-04-24 | CLM |
Claims | 4 | View | |
| 2001-04-24 | ABST |
Abstract | 1 | View | |
| 2001-04-24 | DRW |
Drawings-only black and white line drawings | 34 | View | |
| 2001-04-24 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2001-04-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-04-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-04-24 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2001-04-24 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2001-04-24 | FRPR |
Certified Copy of Foreign Priority Application | 1 | View | |
| 2001-04-24 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2001-04-24 | CLM |
Claims | 2 | View | |
| 2001-04-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2001-04-24 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2001-04-24 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-04-24 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-04-24 | FWCLM |
Index of Claims | 1 | View | |
| 0001-01-03 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
John S. Petersen
Austin, TX
Jang Fung Chen
Cupertino, CA
Attorneys & Agents of Record
Classification
USPC
430/5
H10P76/00
G03F1/32
Y10T428/24802
G03F1/26
G03F7/70125
G03F7/70283
G03F7/70441
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Docket No.
- 55071-050
- Confirmation No.
- 4391
Publication
- Pub. No.
- US20020001758A1
- Pub. Date
- 2002-01-03
Patent Term Adjustment
-10days
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-14
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Quick Facts
- Patent No.
- US 6,541,167
- App. No.
- 09/840,307
- Filed
- 2001-04-24
- Granted
- 2003-04-01
- Pub. No.
- US20020001758A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- -10 days
External Links