Granted Patent
Utility
US 6,668,618
· Confirmation No. 4489
SYSTEMS AND METHODS OF MONITORING THIN FILM DEPOSITION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2006-05-30 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2003-10-31 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-04-23 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-04-23 | SPEC |
Specification | 17 | View | |
| 2001-04-23 | CLM |
Claims | 3 | View | |
| 2001-04-23 | ABST |
Abstract | 1 | View | |
| 2001-04-23 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-04-23 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
John D. Larson III
Palo Alto, CA
Herbert L. Ko
Mountain View, CA
Richard K. Karlquist
Cupertino, CA
Mark A. Hueschen
Palo Alto, CA
Kent W. Carey
Palo Alto, CA
Attorneys & Agents of Record
Classification
USPC
73/64.53
Prosecution
- Examiner
- CYGAN, MICHAEL T
- Art Unit
- 2855
- Customer No.
- 57299
- Docket No.
- 10003396-1
- Confirmation No.
- 4489
Publication
- Pub. No.
- US20020152803A1
- Pub. Date
- 2002-10-24
Patent Term Adjustment
0days
CORRECTIVE ASSIGNMENT TO CORRECT THE EFFECTIVE DATE OF MERGER PREVIOUSLY RECORDED ON REEL 047195 FRAME 0026. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER.
Recorded 2018-11-05
MERGER
Recorded 2018-10-04
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS
Recorded 2017-02-03
CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 017207 FRAME 0020. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Recorded 2016-05-06
PATENT SECURITY AGREEMENT
Recorded 2016-02-11
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS (RELEASES RF 032851-0001)
Recorded 2016-02-02
PATENT SECURITY AGREEMENT
Recorded 2014-05-08
RELEASE OF SECURITY INTEREST
Recorded 2013-05-15
MERGER
Recorded 2013-05-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-05-25
SECURITY AGREEMENT
Recorded 2006-02-24
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-02-22
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-09-18
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Quick Facts
- Patent No.
- US 6,668,618
- App. No.
- 09/840,401
- Filed
- 2001-04-23
- Granted
- 2003-12-30
- Pub. No.
- US20020152803A1
- Examiner
- CYGAN, MICHAEL T
- Art Unit
- 2855
- PTA
- 0 days
External Links