IP Library › Granted Patent US 6,651,488
Granted Patent Utility
US 6,651,488 · Confirmation No. 9564

SYSTEMS AND METHODS OF MONITORING THIN FILM DEPOSITION

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2003-08-05 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-10-07 TRNA Transmittal of New Application 2 View
2002-10-07 SPEC Specification 16 View
2002-10-07 CLM Claims 3 View
2002-10-07 ABST Abstract 1 View
2002-10-07 DRW Drawings-only black and white line drawings 6 View
2002-10-07 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,651,488
App. No.
10/266,857
Filed
2002-10-07
Granted
2003-11-25
Pub. No.
US20030041654A1
Art Unit
2855
PTA
-4 days