Granted Patent
Utility
US 6,556,364
· Confirmation No. 7387
APPARATUS, SYSTEM, AND METHOD FOR PRECISION POSITIONING AND ALIGNMENT OF A LENS IN AN OPTICAL SYSTEM
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-25 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-04-25 | ADS |
Application Data Sheet | 2 | View | |
| 2001-04-25 | SPEC |
Specification | 17 | View | |
| 2001-04-25 | CLM |
Claims | 6 | View | |
| 2001-04-25 | ABST |
Abstract | 1 | View | |
| 2001-04-25 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-04-25 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
359/822
G03F7/708
G02B7/023
G02B7/028
Prosecution
Publication
- Pub. No.
- US20010033437A1
- Pub. Date
- 2001-10-25
Patent Term Adjustment
0days
from
SILICON VALLEY GROUP, INC.,
ASML US, INC.,
ASM LITHOGRAPHY, INC. AND ASML US, LLC,
ASML US, INC.
CHANGE OF NAME, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT
Recorded 2004-03-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-29
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