Granted Patent
Utility
US 6,760,167
· Confirmation No. 3849
APPARATUS SYSTEM AND METHOD FOR PRECISION POSITIONING AND ALIGNMENT OF A LENS IN AN OPTICAL SYSTEM
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Code | Description | Pages | ||
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| 2004-05-19 | IFEE |
Issue Fee Payment (PTO-85B) | 4 | View | |
| 2004-03-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 2 | View | |
| 2004-02-19 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 6 | View | |
| 2004-02-19 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-19 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-02-19 | SPEC |
Specification | 2 | View | |
| 2004-02-19 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-19 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2004-02-19 | FWCLM |
Index of Claims | 1 | View | |
| 2004-01-23 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-04-01 | TRNA |
Transmittal of New Application | 5 | View | |
| 2003-04-01 | ADS |
Application Data Sheet | 2 | View | |
| 2003-04-01 | SPEC |
Specification | 18 | View | |
| 2003-04-01 | CLM |
Claims | 4 | View | |
| 2003-04-01 | ABST |
Abstract | 1 | View | |
| 2003-04-01 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2003-04-01 | OATH |
Oath or Declaration filed | 2 | View | |
| 2003-04-01 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-04-01 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-04-01 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 6 | View | |
| 2003-04-01 | FOR |
Foreign Reference | 10 | View | |
| 2003-04-01 | FOR |
Foreign Reference | 16 | View | |
| 2003-04-01 | FOR |
Foreign Reference | 8 | View | |
| 2003-04-01 | FOR |
Foreign Reference | 6 | View | |
| 2003-04-01 | FOR |
Foreign Reference | 6 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
359/822
G03F7/708
G02B7/023
G02B7/028
Prosecution
Publication
- Pub. No.
- US20030202260A1
- Pub. Date
- 2003-10-30
Patent Term Adjustment
0days
from
SILICON VALLEY GROUP, INC.,
ASML US, INC.,
ASM LITHOGRAPHY, INC. AND ASML US, LLC,
ASML US, INC.
CHANGE OF NAME, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT
Recorded 2004-03-31
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