Patent Application
Utility
App. No. 09/841,166
· Confirmation No. 4117
OPTICAL REDUCTION SYSTEM WITH ELIMINATION OF RETICLE DIFFRACTION INDUCED BIAS
Inventor:
Justin L. Kreuzer
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-25 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-04-25 | ADS |
Application Data Sheet | 1 | View | |
| 2001-04-25 | SPEC |
Specification | 30 | View | |
| 2001-04-25 | CLM |
Claims | 18 | View | |
| 2001-04-25 | ABST |
Abstract | 1 | View | |
| 2001-04-25 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2001-04-25 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Justin L. Kreuzer
Trumbull, CT
Attorneys & Agents of Record
Classification
USPC
359/727
G03F7/70225
G03F7/70566
G03F7/70308
G03F7/70358
Prosecution
- Examiner
- SEYRAFI, SAEED HMT
- Art Unit
- 2873
- Customer No.
- 26111
- Docket No.
- 1857.0120001
- Confirmation No.
- 4117
Publication
- Pub. No.
- US20020027718A1
- Pub. Date
- 2002-03-07
Patent Term Adjustment
-125days
Parent
Claims priority from a provisional application
→
App. 60/199,392
Filed 2000-04-25
· Provisional Application Expired
Child
is a Continuation of
→
App. 10/366,614
· US 6,836,380
Filed 2003-02-14
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 10/982,870
· US 7,031,077
Filed 2004-11-08
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
SILICON VALLEY GROUP, INC.,
ASML US, INC.,
ASM LITHOGRAPHY, INC. AND ASML US, LLC,
ASML US, INC.
CHANGE OF NAME, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT
Recorded 2004-03-31
from
KREUZER, JUSTIN L.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-10
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Quick Facts
- App. No.
- 09/841,166
- Filed
- 2001-04-25
- Granted
- 2003-02-18
- Pub. No.
- US20020027718A1
- Examiner
- SEYRAFI, SAEED HMT
- Art Unit
- 2873
- PTA
- -125 days
External Links