Patent Application
Utility
App. No. 09/841,568
· Confirmation No. 6321
DUAL DAMASCENE PROCESS USING AN OXIDE LINER FOR A DIELECTRIC BARRIER LAYER
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Inventors
Shyh-Dar Lee
Hsinchu Hsien, TAIWAN
Chen-Chiu Hsue
Hsinchu, TAIWAN
Attorneys & Agents of Record
Classification
USPC
438/637
H10P14/6304
H10W20/425
H10W20/47
H10P14/6334
H10W20/084
H10P14/662
H10W20/081
H10P14/687
H10W20/42
H10W20/076
H10W20/075
H10P14/6342
H10W20/071
Prosecution
- Examiner
- NHU, DAVID
- Art Unit
- 2818
- Docket No.
- 3158/OJ116
- Confirmation No.
- 6321
Publication
- Pub. No.
- US20020155695A1
- Pub. Date
- 2002-10-24
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-01-27
RE-RECORD TO CORRECT THE NAME OF CONVEYING PARTY. PREVIOUSLY RECORDED AT REEL 011740 AND FRAME 0500.
Recorded 2002-02-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-19
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Quick Facts
- App. No.
- 09/841,568
- Filed
- 2001-04-19
- Granted
- 2002-11-26
- Pub. No.
- US20020155695A1
- Examiner
- NHU, DAVID
- Art Unit
- 2818
- PTA
- 0 days
External Links