IP Library › Granted Patent US 6,451,620
Granted Patent Utility
US 6,451,620 · Confirmation No. 8967

METHOD FOR ETCHING ORGANIC FILM, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PATTERN FORMATION METHOD

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2008-05-15 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-05-15 TRNA Transmittal of New Application 2 View
2001-05-15 ADS Application Data Sheet 2 View
2001-05-15 SPEC Specification 75 View
2001-05-15 CLM Claims 6 View
2001-05-15 ABST Abstract 1 View
2001-05-15 DRW Drawings-only black and white line drawings 23 View
2001-05-15 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,451,620
App. No.
09/854,579
Filed
2001-05-15
Granted
2002-09-17
Pub. No.
US20010049150A1
Examiner
NHU, DAVID
Art Unit
2818
PTA
-67 days