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App. No. 10/214,754 · Confirmation No. 6326

METHOD FOR ETCHING ORGANIC FILM, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PATTERN FORMATION METHOD

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Quick Facts
App. No.
10/214,754
Filed
2002-08-09
Granted
2004-12-07
Pub. No.
US20020197747A1
Examiner
NHU, DAVID
Art Unit
2818
PTA
-32 days