Patent Assignment
Reel/Frame 013526/0546
Change of Name
Recorded: 2002-11-25
Pages: 5
Assignor
NIHON SHINKU GIJUTSU KABUSHIKI KAISHA
Executed: 2001-07-02
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Method for Etching Organic Film, Method for Fabricating Semiconductor Device and Pattern Formation Method