IP Library › Granted Patent US 6,713,134
Granted Patent Utility
US 6,713,134 · Confirmation No. 4827

APPARATUS FOR SPIN-COATING SEMICONDUCTOR SUBSTRATE AND METHOD OF DOING THE SAME

Inventor: Shuichi Furuoya
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2003-12-29 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-10-06 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-06 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2003-10-06 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-06 FWCLM Index of Claims 1 View
2003-10-06 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-06 SPEC Specification 1 View
2003-09-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-09-10 CLM Claims 2 View
2003-09-10 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-06-13 CTNF Non-Final Rejection 7 View
2003-06-13 892 List of references cited by examiner 1 View
2003-03-31 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-03-31 CLM Claims 1 View
2003-03-31 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-03-31 CLM Claims 1 View
2002-12-30 CTNF Non-Final Rejection 8 View
2002-12-30 892 List of references cited by examiner 1 View
2002-12-30 1449 List of References cited by applicant and considered by examiner 1 View
2002-12-30 FOR Foreign Reference 5 View
2002-12-30 FOR Foreign Reference 12 View
2002-12-30 FOR Foreign Reference 7 View
2002-12-16 SRNT Examiner's search strategy and results 1 View
2002-12-15 FOR Foreign Reference 3 View
2002-12-15 FOR Foreign Reference 5 View
2002-03-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-03-18 FOR Foreign Reference 7 View
2002-02-25 CFILE Request for Corrected Filing Receipt 3 View
2001-07-23 CFILE Request for Corrected Filing Receipt 5 View
2001-05-14 TRNA Transmittal of New Application 2 View
2001-05-14 A.PE Preliminary Amendment 2 View
2001-05-14 SPEC Specification 18 View
2001-05-14 CLM Claims 5 View
2001-05-14 ABST Abstract 1 View
2001-05-14 DRW Drawings-only black and white line drawings 9 View
2001-05-14 OATH Oath or Declaration filed 1 View
2001-05-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-05-14 SRFW Search information including classification, databases and other search related notes 1 View
2001-05-14 FWCLM Index of Claims 1 View
2001-05-14 TRNA Transmittal of New Application 2 View
2001-05-14 SPEC Specification 18 View
2001-05-14 CLM Claims 5 View
2001-05-14 ABST Abstract 1 View
2001-05-14 DRW Drawings-only black and white line drawings 9 View
2001-05-14 OATH Oath or Declaration filed 1 View
2001-05-14 A.PE Preliminary Amendment 1 View
2001-05-14 SPEC Specification 1 View
2001-05-14 WFEE Fee Worksheet (SB06) 1 View
2001-05-14 WFEE Fee Worksheet (SB06) 1 View
2001-05-14 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,713,134
App. No.
09/854,614
Filed
2001-05-14
Granted
2004-03-30
Pub. No.
US20010029885A1
Art Unit
1762
PTA
-1 days