Granted Patent
Utility
Small
US 6,525,805
· Confirmation No. 9750
BACKSIDE ALIGNMENT SYSTEM AND METHOD
Inventor:
Konrad Heinle
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-14 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-05-14 | SPEC |
Specification | 10 | View | |
| 2001-05-14 | CLM |
Claims | 4 | View | |
| 2001-05-14 | ABST |
Abstract | 1 | View | |
| 2001-05-14 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-05-14 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Konrad Heinle
Santa Clara, CA
Attorneys & Agents of Record
Classification
USPC
355/53
G03F7/70691
G03B27/42
G03F9/7084
G03F9/7088
Prosecution
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- Docket No.
- 3521.149 (ALJ)
- Confirmation No.
- 9750
Publication
- Pub. No.
- US20020167649A1
- Pub. Date
- 2002-11-14
Patent Term Adjustment
-55days
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Quick Facts
- Patent No.
- US 6,525,805
- App. No.
- 09/855,486
- Filed
- 2001-05-14
- Granted
- 2003-02-25
- Pub. No.
- US20020167649A1
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- PTA
- -55 days
External Links