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App. No. 09/873,157 · Confirmation No. 3072

METHOD FOR MEASURING WIDTH OF BOTTOM UNDER CUT DURING ETCHING PROCESS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2001-06-01 TRNA Transmittal of New Application 2 View
2001-06-01 SPEC Specification 6 View
2001-06-01 CLM Claims 2 View
2001-06-01 ABST Abstract 1 View
2001-06-01 DRW Drawings-only black and white line drawings 2 View
2001-06-01 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
09/873,157
Filed
2001-06-01
Granted
2003-02-18
Pub. No.
US20020179568A1
Art Unit
1763
PTA
0 days