IP Library Patent Application 09874109
Patent Application Utility
App. No. 09/874,109 · Confirmation No. 7881

METHOD OF ETCHING HIGH ASPECT RATIO OPENINGS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-03-16 LET. Miscellaneous Incoming Letter 1 View
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2003-12-23 892 List of references cited by examiner 1 View
2003-12-23 1449 List of References cited by applicant and considered by examiner 1 View
2003-12-23 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-23 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-28 LET. Miscellaneous Incoming Letter 1 View
2001-06-05 TRNA Transmittal of New Application 1 View
2001-06-05 ADS Application Data Sheet 1 View
2001-06-05 SPEC Specification 11 View
2001-06-05 CLM Claims 4 View
2001-06-05 ABST Abstract 1 View
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2001-06-05 OATH Oath or Declaration filed 4 View
2001-06-05 WFEE Fee Worksheet (SB06) 1 View
2001-06-05 WFEE Fee Worksheet (SB06) 1 View
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2001-06-05 FOR Foreign Reference 8 View
2001-06-05 FOR Foreign Reference 2 View
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2001-06-05 FOR Foreign Reference 4 View
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Quick Facts
App. No.
09/874,109
Filed
2001-06-05
Granted
2004-06-01
Pub. No.
US20020179570A1
Art Unit
1763
PTA
-47 days