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App. No. 09/876,238 · Confirmation No. 8184

MONOCHROMATIC VACUUM ULTRAVIOLET LIGHT SOURCE FOR PHOTOLITHOGRAPHY APPLICATIONS BASED ON A HIGH-PRESSURE MICROHOLLOW CATHODE DISCHARGE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2007-06-28 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2007-06-25 PA.. Power of Attorney 1 View
2007-06-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-11-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-09-15 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-09-15 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-09-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-09-15 FWCLM Index of Claims 1 View
2003-09-15 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-15 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2003-08-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2003-08-18 CLM Claims 2 View
2003-08-18 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-06-04 CTFR Final Rejection 7 View
2003-05-31 SRNT Examiner's search strategy and results 2 View
2003-03-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-03-18 CLM Claims 1 View
2003-03-18 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2002-12-18 CTNF Non-Final Rejection 5 View
2002-12-18 892 List of references cited by examiner 1 View
2002-12-04 SRNT Examiner's search strategy and results 2 View
2002-01-28 LET. Miscellaneous Incoming Letter 2 View
2002-01-28 XT/ Extension of Time 3 View
2002-01-28 TRNA Transmittal of New Application 3 View
2002-01-28 DRW Drawings-only black and white line drawings 5 View
2001-10-30 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-10-05 LET. Miscellaneous Incoming Letter 4 View
2001-10-05 OATH Oath or Declaration filed 4 View
2001-08-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2001-08-27 SPEC Specification 1 View
2001-08-27 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2001-06-07 TRNA Transmittal of New Application 5 View
2001-06-07 SPEC Specification 10 View
2001-06-07 CLM Claims 3 View
2001-06-07 ABST Abstract 1 View
2001-06-07 DRW Drawings-only black and white line drawings 10 View
2001-06-07 OATH Oath or Declaration filed 4 View
2001-06-07 WFEE Fee Worksheet (SB06) 1 View
2001-06-07 WFEE Fee Worksheet (SB06) 2 View
2001-06-07 WCLM Claims Worksheet (PTO-2022) 1 View
2001-06-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-06-07 SRFW Search information including classification, databases and other search related notes 1 View
2001-06-07 FWCLM Index of Claims 1 View
2001-06-07 TRNA Transmittal of New Application 5 View
2001-06-07 SPEC Specification 10 View
2001-06-07 CLM Claims 3 View
2001-06-07 ABST Abstract 1 View
2001-06-07 DRW Drawings-only black and white line drawings 5 View
2001-06-07 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
09/876,238
Filed
2001-06-07
Granted
2004-03-09
Pub. No.
US20030178928A1
Art Unit
2879
PTA
-134 days