Patent Assignment
Reel/Frame 063443/0118
Confirmatory License
Recorded: 2023-04-25
Pages: 2
Assignor
OLD DOMINION UNIVERSITY RESEARCH FOUNDATION
Executed: 2023-01-20
Assignee
UNITED STATES DEPARTMENT OF ENERGY
1000 INDEPENDENCE AVE. S.W., WASHINGTON, DISTRICT OF COLUMBIA, 20585
Covered Property
(1)
Monochromatic Vacuum Ultraviolet Light Source for Photolithography Applications Based on a High-Pressure Microhollow Cathode Discharge
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.