Granted Patent
Utility
US 6,670,081
· Confirmation No. 8635
OPTICAL PROXIMITY CORRECTION METHOD UTILIZING SERIFS HAVING VARIABLE DIMENSIONS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-02 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-06-11 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-06-11 | SPEC |
Specification | 21 | View | |
| 2001-06-11 | CLM |
Claims | 3 | View | |
| 2001-06-11 | ABST |
Abstract | 1 | View | |
| 2001-06-11 | DRW |
Drawings-only black and white line drawings | 6 | View |
Inventors
Thomas Laidig
Point Richmond, CA
Kurt E. Wampler
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
430/5
H10P76/00
G03F1/36
G03F7/70441
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Customer No.
- 20277
- Docket No.
- 55071-053
- Confirmation No.
- 8635
Publication
- Pub. No.
- US20020028393A1
- Pub. Date
- 2002-03-07
Patent Term Adjustment
-100days
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-28
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Quick Facts
- Patent No.
- US 6,670,081
- App. No.
- 09/877,231
- Filed
- 2001-06-11
- Granted
- 2003-12-30
- Pub. No.
- US20020028393A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- -100 days
External Links