IP Library › Granted Patent US 6,821,871
Granted Patent Utility
US 6,821,871 · Confirmation No. 3885

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATMENT METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS

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2004-11-03 BIB Bibliographic Data Sheet 1 View
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2004-08-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-19 1449 List of References cited by applicant and considered by examiner 2 View
2004-08-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-19 FWCLM Index of Claims 1 View
2004-08-19 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-06 LET. Miscellaneous Incoming Letter 1 View
2004-03-15 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2004-03-15 FOR Foreign Reference 26 View
2004-01-09 LET. Miscellaneous Incoming Letter 3 View
2004-01-09 XT/ Extension of Time 3 View
2004-01-09 RCEX Request for Continued Examination (RCE) 1 View
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2004-01-09 FOR Foreign Reference 9 View
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2004-01-09 FOR Foreign Reference 18 View
2004-01-09 FOR Foreign Reference 5 View
2003-09-16 RCEX Request for Continued Examination (RCE) 1 View
2003-09-16 XT/ Extension of Time 1 View
2003-09-16 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-09-16 FOR Foreign Reference 18 View
2003-09-16 FOR Foreign Reference 17 View
2003-09-16 FOR Foreign Reference 18 View
2003-09-16 FOR Foreign Reference 5 View
2003-09-16 LET. Miscellaneous Incoming Letter 2 View
2003-09-08 A.NE Response After Final Action 1 View
2003-09-08 WFEE Fee Worksheet (SB06) 1 View
2003-08-27 CTAV Advisory Action (PTOL-303) 3 View
2003-08-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-08-12 CLM Claims 3 View
2003-08-12 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2003-08-12 LET. Miscellaneous Incoming Letter 1 View
2003-07-28 A.NE Response After Final Action 2 View
2003-07-28 CLM Claims 3 View
2003-07-28 REM Applicant Arguments/Remarks Made in an Amendment 13 View
2003-03-26 CTFR Final Rejection 8 View
2003-03-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-03-05 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-03-05 APPENDIX Appendix to the specification 1 View
2003-03-05 LET. Miscellaneous Incoming Letter 1 View
2002-10-07 CTFR Final Rejection 10 View
2002-10-07 892 List of references cited by examiner 1 View
2002-10-03 SRNT Examiner's search strategy and results 4 View
2002-07-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-07-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2002-07-16 APPENDIX Appendix to the specification 1 View
2002-07-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-07-15 CLM Claims 2 View
2002-07-15 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2002-07-15 APPENDIX Appendix to the specification 3 View
2002-07-15 XT/ Extension of Time 1 View
2002-07-15 LET. Miscellaneous Incoming Letter 1 View
2002-04-29 C.AD Change of Address 1 View
2002-02-15 CTNF Non-Final Rejection 7 View
2002-02-15 892 List of references cited by examiner 1 View
2002-02-05 SRNT Examiner's search strategy and results 2 View
2002-01-29 LET. Miscellaneous Incoming Letter 1 View
2001-10-04 LET. Miscellaneous Incoming Letter 2 View
2001-10-04 OATH Oath or Declaration filed 5 View
2001-08-13 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-08-10 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-07-25 FRPR Certified Copy of Foreign Priority Application 20 View
2001-07-25 FRPR Certified Copy of Foreign Priority Application 27 View
2001-06-13 TRNA Transmittal of New Application 1 View
2001-06-13 ADS Application Data Sheet 2 View
2001-06-13 SPEC Specification 21 View
2001-06-13 CLM Claims 4 View
2001-06-13 ABST Abstract 1 View
2001-06-13 DRW Drawings-only black and white line drawings 4 View
2001-06-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-06-13 SRFW Search information including classification, databases and other search related notes 1 View
2001-06-13 FWCLM Index of Claims 1 View
2001-06-13 TRNA Transmittal of New Application 1 View
2001-06-13 DRW Drawings-only black and white line drawings 4 View
2001-06-13 SPEC Specification 21 View
2001-06-13 CLM Claims 4 View
2001-06-13 ABST Abstract 1 View
2001-06-13 WFEE Fee Worksheet (SB06) 1 View
2001-06-13 WFEE Fee Worksheet (SB06) 3 View
2001-06-13 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,821,871
App. No.
09/879,122
Filed
2001-06-13
Granted
2004-11-23
Pub. No.
US20020016051A1
Examiner
ROMAN, ANGEL
Art Unit
2812
PTA
-382 days