IP Library › Granted Patent US 6,632,685
Granted Patent Utility
US 6,632,685 · Confirmation No. 8040

APPARATUS AND METHOD FOR DETERMINING VARIOUS PROCESSES OF WAFER FABRICATION IN A SEMICONDUCTOR DEVICE MANUFACTURING TECHNOLOGY

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2011-10-14 C.AD Change of Address 2 View
2011-10-14 PA.. Power of Attorney 2 View
2011-10-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-10-14 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2003-08-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-06-28 TRNA Transmittal of New Application 4 View
2001-06-28 SPEC Specification 5 View
2001-06-28 CLM Claims 2 View
2001-06-28 ABST Abstract 1 View
2001-06-28 DRW Drawings-only black and white line drawings 1 View
2001-06-28 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,632,685
App. No.
09/894,753
Filed
2001-06-28
Granted
2003-10-14
Pub. No.
US20020108893A1
Examiner
PERT, EVAN T
Art Unit
2829
PTA
-2 days