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App. No. 09/896,945 · Confirmation No. 9974

Process for etching silicon wafers

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2001-06-29 TRNA Transmittal of New Application 4 View
2001-06-29 ADS Application Data Sheet 2 View
2001-06-29 SPEC Specification 37 View
2001-06-29 CLM Claims 6 View
2001-06-29 ABST Abstract 1 View
2001-06-29 DRW Drawings-only black and white line drawings 9 View
2001-06-29 OATH Oath or Declaration filed 4 View
2001-06-29 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
09/896,945
Filed
2001-06-29
Pub. No.
US20020034881A1
Examiner
VINH, LAN
Art Unit
1765