IP Library › Patent Application 09910904
Patent Application Utility
App. No. 09/910,904 · Confirmation No. 3566

PLANARIZING METHOD OF SEMICONDUCTOR WAFER AND APPARATUS THEREOF

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-06-04 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-10 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-10 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2004-05-10 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-05-10 NFDR Notice of Formal Drawings Required 1 View
2004-05-10 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-10 FWCLM Index of Claims 1 View
2004-05-10 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-10 SRNT Examiner's search strategy and results 4 View
2004-01-20 RCEX Request for Continued Examination (RCE) 4 View
2004-01-20 CLM Claims 6 View
2004-01-20 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2003-10-17 CTFR Final Rejection 16 View
2003-10-13 SRNT Examiner's search strategy and results 1 View
2003-08-15 SRNT Examiner's search strategy and results 1 View
2003-08-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-08-11 CLM Claims 5 View
2003-08-11 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-07-02 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2003-05-29 LET. Miscellaneous Incoming Letter 7 View
2003-05-09 CTNF Non-Final Rejection 12 View
2003-05-09 892 List of references cited by examiner 1 View
2003-05-09 1449 List of References cited by applicant and considered by examiner 1 View
2003-05-05 SRNT Examiner's search strategy and results 2 View
2001-09-24 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2001-09-24 SPECNO Specification - Not in English 24 View
2001-09-24 FRPR Certified Copy of Foreign Priority Application 33 View
2001-09-24 TRNA Transmittal of New Application 1 View
2001-09-24 SPEC Specification 29 View
2001-09-24 CLM Claims 6 View
2001-09-24 ABST Abstract 1 View
2001-09-19 PEFN Pre-Exam Formalities Notice 1 View
2001-07-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-07-24 SRFW Search information including classification, databases and other search related notes 1 View
2001-07-24 FWCLM Index of Claims 1 View
2001-07-24 TRNA Transmittal of New Application 1 View
2001-07-24 DRW Drawings-only black and white line drawings 10 View
2001-07-24 SPEC Specification 30 View
2001-07-24 CLM Claims 6 View
2001-07-24 ABST Abstract 1 View
2001-07-24 OATH Oath or Declaration filed 4 View
2001-07-24 WFEE Fee Worksheet (SB06) 1 View
2001-07-24 WFEE Fee Worksheet (SB06) 1 View
2001-07-24 WCLM Claims Worksheet (PTO-2022) 1 View
2001-07-24 FRPR Certified Copy of Foreign Priority Application 1 View
2001-07-24 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-07-24 TRNA Transmittal of New Application 1 View
2001-07-24 SPEC Specification 19 View
2001-07-24 CLM Claims 4 View
2001-07-24 ABST Abstract 1 View
2001-07-24 DRW Drawings-only black and white line drawings 10 View
2001-07-24 OATH Oath or Declaration filed 4 View
2001-07-24 LET. Miscellaneous Incoming Letter 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
09/910,904
Filed
2001-07-24
Granted
2004-08-17
Pub. No.
US20020028581A1
Art Unit
1765
PTA
-2 days