Light emitting diodes with graded composition active regions
View Patent ↗A light emitting device in accordance with an embodiment of the present invention includes a first semiconductor layer of a first conductivity type having a first surface, and an active region formed overlying the first semiconductor layer. The active region includes a second semiconductor layer which is either a quantum well layer or a barrier layer. The second semiconductor layer is formed from a semiconductor alloy having a composition graded in a direction substantially perpendicular to the first surface of the first semiconductor layer. The light emitting device also includes a third semiconductor layer of a second conductivity type formed overlying the active region.
1. A method of forming a light emitting device, the method comprising:
forming a first semiconductor layer of a first conductivity type and having a first surface;
forming an active region over the first semiconductor layer, the active region including at least two quantum well layers separated by a barrier layer, wherein one of a quantum well layer and the barrier layer is a graded layer formed from a III-Nitride semiconductor alloy of In x Al y Ga 1−x−y N where 0≦x≦1, 0≦y≦1, x+y≦1, the graded layer having a composition graded in a direction substantially perpendicular to the first surface of the first semiconductor layer; and
forming a third semiconductor layer of a second conductivity type over the active region.
2. The method of claim 1 , wherein the graded layer has a wurtzite crystal structure.
3. The method of claim 1 , further comprising grading the composition of the III-Nitride semiconductor alloy in the graded layer asymmetrically.
4. The method of claim 1 , further comprising grading the composition of the III-Nitride semiconductor alloy in the graded layer to reduce the effect of a piezoelectric field in the active region.
5. The method of claim 1 , further comprising grading a mole fraction of the III-Nitride semiconductor alloy in the graded layer linearly.
6. The method of claim 1 , further comprising grading the mole fraction of indium in the graded layer.
7. The method of claim 1 , further comprising grading the mole fraction of aluminum in the graded layer.
8. The method of claim 1 , wherein the active region is formed directly on the first semiconductor layer.
9. A method of forming a light emitting device, the method comprising:
forming a first semiconductor layer of a first conductivity type having a first surface;
forming an active region overlying the first semiconductor layer, the active region including a plurality of quantum well layers separated by at least one barrier layer, the barrier layer formed from a III-Nitride semiconductor alloy of In x Al y Ga 1−x−y N where 0≦x≦1, 0≦y≦1, x+y≦1, the barrier layer having an indium mole fraction graded in a direction substantially perpendicular to the first surface of the first semiconductor layer; and
forming another semiconductor layer of a second conductivity type overlying the active region.
10. The method of claim 9 , further comprising forming the barrier layer in a wurtzite crystal structure.
11. The method of claim 9 , further comprising grading the indium mole fraction of the III-Nitride semiconductor alloy asymmetrically.
12. The method of claim 9 , further comprising grading the indium mole fraction of the III-Nitride semiconductor alloy to reduce an effect of a piezoelectric field in the active region.
13. The method of claim 9 , further comprising grading the indium mole fraction of the III-Nitride semiconductor alloy linearly.
14. The method of claim 9 , wherein the active region includes a plurality of barrier layers each formed from a III-Nitride semiconductor alloy having an indium mole fraction graded in a direction substantially perpendicular to the first surface of the first semiconductor layer.
15. The method of claim 9 , further comprising grading an indium mole fraction of at least one of the plurality of quantum well layers.
16. The method of claim 1 wherein the graded layer has a graded composition of a first element, wherein a change in composition of the first element in the graded layer is 1% per angstrom across a thickness of the graded layer.