Granted Patent
Utility
US 6,664,009
· Confirmation No. 1052
METHOD AND APPARATUS FOR ALLOWING PHASE CONFLICTS IN PHASE SHIFTING MASK AND CHROMELESS PHASE EDGES
Inventor:
Hua-Yu Liu
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-17 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-07-27 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-07-27 | ADS |
Application Data Sheet | 2 | View | |
| 2001-07-27 | SPEC |
Specification | 18 | View | |
| 2001-07-27 | CLM |
Claims | 8 | View | |
| 2001-07-27 | ABST |
Abstract | 1 | View | |
| 2001-07-27 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-07-27 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Hua-Yu Liu
Palo Alto, CA
Attorneys & Agents of Record
Classification
USPC
430/5
G03F1/30
G03F1/70
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Customer No.
- 29477
- Docket No.
- NTI-017
- Confirmation No.
- 1052
Publication
- Pub. No.
- US20030023401A1
- Pub. Date
- 2003-01-30
Patent Term Adjustment
0days
No related applications found.
CONFIRMATION OF ASSIGNMENT
Recorded 2010-01-13
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-02-04
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Quick Facts
- Patent No.
- US 6,664,009
- App. No.
- 09/917,581
- Filed
- 2001-07-27
- Granted
- 2003-12-16
- Pub. No.
- US20030023401A1
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- 0 days
External Links