IP Library Granted Patent US 6,664,009
Granted Patent Utility
US 6,664,009 · Confirmation No. 1052

METHOD AND APPARATUS FOR ALLOWING PHASE CONFLICTS IN PHASE SHIFTING MASK AND CHROMELESS PHASE EDGES

Inventor: Hua-Yu Liu
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Code Description Pages PDF
2003-10-17 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-07-27 TRNA Transmittal of New Application 2 View
2001-07-27 ADS Application Data Sheet 2 View
2001-07-27 SPEC Specification 18 View
2001-07-27 CLM Claims 8 View
2001-07-27 ABST Abstract 1 View
2001-07-27 DRW Drawings-only black and white line drawings 8 View
2001-07-27 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,664,009
App. No.
09/917,581
Filed
2001-07-27
Granted
2003-12-16
Pub. No.
US20030023401A1
Art Unit
1756
PTA
0 days