Granted Patent
Utility
US 6,534,375
· Confirmation No. 2394
METHOD OF FORMING A CAPACITOR IN A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE USING A METAL SILICON NITRIDE LAYER TO PROTECT AN UNDERLYING METAL SILICIDE LAYER FROM OXIDATION DURING SUBSEQUENT PROCESSING STEPS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2020-06-11 | OATH |
Oath or Declaration filed | 262 | View | |
| 2001-08-08 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-08-08 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-08-08 | SPEC |
Specification | 103 | View | |
| 2001-08-08 | CLM |
Claims | 18 | View | |
| 2001-08-08 | ABST |
Abstract | 1 | View | |
| 2001-08-08 | DRW |
Drawings-only black and white line drawings | 127 | View | |
| 2001-08-08 | OATH |
Oath or Declaration filed | 5 | View |
Inventors
Shinpei Iijima
Akishima, JAPAN
Yuzuru Ohji
Hinode, JAPAN
Masato Kunitomo
Ome, JAPAN
Masahiko Hiratani
Akishima, JAPAN
Yuichi Matsui
Kokubunji, JAPAN
Hiroyuki Ohta
Tsuchiura, JAPAN
Yukihiro Kumagai
Chiyoda, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/386
H10B12/00
H10D1/692
H10P14/69393
H10B12/0335
H10B12/315
H10D1/716
H10D1/042
H10P14/6334
H10P14/6529
H10P14/6544
Prosecution
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- Docket No.
- XA-9532
- Confirmation No.
- 2394
Foreign Priority
2000-249675
·
2000-08-21
·
JAPAN
Publication
- Pub. No.
- US20020022357A1
- Pub. Date
- 2002-02-21
Patent Term Adjustment
0days
TESSERA, INC.,
INVENSAS BONDING TECHNOLOGIES, INC. (F/K/A ZIPTRONIX, INC.),
FOTONATION CORPORATION (F/K/A DIGITALOPTICS CORPORATION AND F/K/A DIGITALOPTICS CORPORATION MEMS),
INVENSAS CORPORATION,
TESSERA ADVANCED TECHNOLOGIES, INC,
DTS, INC.,
DTS LLC,
PHORUS, INC.,
IBIQUITY DIGITAL CORPORATION
from
ROYAL BANK OF CANADA
RELEASE OF SECURITY INTEREST
Recorded 2020-06-11
from
DTS, INC.,
IBIQUITY DIGITAL CORPORATION,
INVENSAS BONDING TECHNOLOGIES, INC.,
INVENSAS CORPORATION,
PHORUS, INC.,
ROVI GUIDES, INC.,
ROVI SOLUTIONS CORPORATION,
ROVI TECHNOLOGIES CORPORATION,
TESSERA ADVANCED TECHNOLOGIES, INC.,
TESSERA, INC.,
TIVO SOLUTIONS INC.,
VEVEO, INC.
SECURITY INTEREST
Recorded 2020-06-01
from
DIGITALOPTICS CORPORATION,
DIGITALOPTICS CORPORATION MEMS,
DTS, INC.,
DTS, LLC,
IBIQUITY DIGITAL CORPORATION,
INVENSAS CORPORATION,
PHORUS, INC.,
TESSERA ADVANCED TECHNOLOGIES, INC.,
TESSERA, INC.,
ZIPTRONIX, INC.
SECURITY INTEREST
Recorded 2016-12-02
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-05-13
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-03-25
from
IIJIMA, SHINPEI,
KUNITOMO, MASATO,
OHJI, YUZURU,
KUMAGAI, YUKIHIRO,
OHTA, HIROYUKI,
HIRATANI, MASAHIKO,
MATSUI, YUICHI
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-08
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Quick Facts
- Patent No.
- US 6,534,375
- App. No.
- 09/923,406
- Filed
- 2001-08-08
- Granted
- 2003-03-18
- Pub. No.
- US20020022357A1
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- PTA
- 0 days
External Links