IP Library Granted Patent US 6,583,048
Granted Patent Utility
US 6,583,048 · Confirmation No. 6193

ORGANOSILICON PRECURSORS FOR INTERLAYER DIELECTRIC FILMS WITH LOW DIELECTRIC CONSTANTS

⬇ PDF
Code Description Pages PDF
2001-08-31 TRNA Transmittal of New Application 2 View
2001-08-31 SPEC Specification 30 View
2001-08-31 CLM Claims 7 View
2001-08-31 ABST Abstract 1 View
2001-08-31 DRW Drawings-only black and white line drawings 1 View
2001-08-31 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,583,048
App. No.
09/944,042
Filed
2001-08-31
Granted
2003-06-24
Pub. No.
US20020142579A1
Examiner
LE, THAO P
Art Unit
2818
PTA
-106 days