IP Library › Granted Patent US 6,607,605
Granted Patent Utility
US 6,607,605 · Confirmation No. 1971

CLEANING OF SEMICONDUCTOR PROCESS EQUIPMENT CHAMBER PARTS USING ORGANIC SOLVENTS

Inventor: Samantha Tan
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2012-03-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-03-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-02-29 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-02-21 PA.. Power of Attorney 1 View
2012-02-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-21 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2001-08-31 TRNA Transmittal of New Application 1 View
2001-08-31 SPEC Specification 14 View
2001-08-31 CLM Claims 6 View
2001-08-31 ABST Abstract 1 View
2001-08-31 DRW Drawings-only black and white line drawings 6 View
2001-08-31 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,607,605
App. No.
09/945,259
Filed
2001-08-31
Granted
2003-08-19
Pub. No.
US20020066466A1
Art Unit
1746
PTA
-41 days