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App. No. 09/965,233 · Confirmation No. 7888

COMPOSITIONS FOR CHEMICAL MECHANICAL PLANARIZATION OF TANTALUM AND TANTALUM NITRIDE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2012-10-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-10-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-10-09 PA.. Power of Attorney 4 View
2012-10-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-08-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-09-25 TRNA Transmittal of New Application 1 View
2001-09-25 SPEC Specification 21 View
2001-09-25 CLM Claims 5 View
2001-09-25 ABST Abstract 1 View
2001-09-25 OATH Oath or Declaration filed 4 View
2001-09-25 LET. Miscellaneous Incoming Letter 7 View
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Quick Facts
App. No.
09/965,233
Filed
2001-09-25
Granted
2003-10-28
Pub. No.
US20030131535A1
Art Unit
1755
PTA
-61 days