Granted Patent
Utility
US 6,482,555
· Confirmation No. 9250
METHOD OF PATTERNING SUB-0.25LAMBDA LINE FEATURES WITH HIGH TRANSMISSION, "ATTENUATED" PHASE SHIFT MASKS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-10-15 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-10-15 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-10-15 | SPEC |
Specification | 18 | View | |
| 2001-10-15 | CLM |
Claims | 5 | View | |
| 2001-10-15 | ABST |
Abstract | 1 | View | |
| 2001-10-15 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-10-15 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
J. Fung Chen
Cupertino, CA
Roger Caldwell
Milpitas, CA
Tom Laidig
Point Richmond, CA
Kurt E. Wampler
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
430/5
G03F1/32
G03F7/2063
G03F1/26
G03F1/30
G03F1/34
G03F1/36
G03F7/70125
G03F7/70283
Prosecution
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- Docket No.
- 55071-116
- Confirmation No.
- 9250
Publication
- Pub. No.
- US20020048708A1
- Pub. Date
- 2002-04-25
Patent Term Adjustment
-117days
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- Patent No.
- US 6,482,555
- App. No.
- 09/976,336
- Filed
- 2001-10-15
- Granted
- 2002-11-19
- Pub. No.
- US20020048708A1
- Examiner
- MOHAMEDULLA, SALEHA R
- Art Unit
- 1756
- PTA
- -117 days
External Links