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App. No. 09/977,386 · Confirmation No. 3085

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE BY FILLING GAPS BETWEEN GATE ELECTRODES WITH HSQ

Inventor: Susumu Watanabe
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-10-16 TRNA Transmittal of New Application 2 View
2001-10-16 ADS Application Data Sheet 1 View
2001-10-16 SPEC Specification 3 View
2001-10-16 SPEC Specification 3 View
2001-10-16 SPEC Specification 3 View
2001-10-16 SPEC Specification 2 View
2001-10-16 CLM Claims 3 View
2001-10-16 ABST Abstract 1 View
2001-10-16 DRW Drawings-only black and white line drawings 3 View
2001-10-16 DRW Drawings-only black and white line drawings 3 View
2001-10-16 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/977,386
Filed
2001-10-16
Granted
2003-04-01
Pub. No.
US20020052108A1
Art Unit
2813
PTA
-126 days