IP Library › Granted Patent US 6,692,877
Granted Patent Utility
US 6,692,877 · Confirmation No. 8434

MASK FOR BEAM EXPOSURE HAVING MEMBRANE STRUCTURE AND STENCIL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

Inventor: Yasuhisa Yamada
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-09-02 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-07-11 A.NE Response After Final Action 1 View
2003-07-11 SPEC Specification 4 View
2003-07-11 CLM Claims 5 View
2003-07-11 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-07-11 LET. Miscellaneous Incoming Letter 1 View
2003-07-11 DRW Drawings-only black and white line drawings 3 View
2001-10-17 TRNA Transmittal of New Application 1 View
2001-10-17 SPEC Specification 14 View
2001-10-17 CLM Claims 4 View
2001-10-17 ABST Abstract 1 View
2001-10-17 DRW Drawings-only black and white line drawings 20 View
2001-10-17 OATH Oath or Declaration filed 1 View
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Quick Facts
Patent No.
US 6,692,877
App. No.
09/982,051
Filed
2001-10-17
Granted
2004-02-17
Pub. No.
US20020045109A1
Art Unit
1756
PTA
-120 days