IP Library › Granted Patent US 6,553,562
Granted Patent Utility
US 6,553,562 · Confirmation No. 3965

METHOD AND APPARATUS FOR GENERATING MASKS UTILIZED IN CONJUNCTION WITH DIPOLE ILLUMINATION TECHNIQUES

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 Code Description Pages PDF
2002-02-13 TRNA Transmittal of New Application 5 View
2002-02-13 DRW Drawings-only black and white line drawings 23 View
2002-02-13 OATH Oath or Declaration filed 9 View
2001-11-05 TRNA Transmittal of New Application 1 View
2001-11-05 A.PE Preliminary Amendment 2 View
2001-11-05 SPEC Specification 26 View
2001-11-05 CLM Claims 9 View
2001-11-05 ABST Abstract 1 View
2001-11-05 DRW Drawings-only black and white line drawings 23 View
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Quick Facts
Patent No.
US 6,553,562
App. No.
09/985,621
Filed
2001-11-05
Granted
2003-04-22
Pub. No.
US20020166107A1
Art Unit
2825
PTA
0 days