Granted Patent
Utility
US 6,527,862
· Confirmation No. 4177
FLOW CONTROLLER
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-11-16 | TRNA |
Transmittal of New Application | 9 | View | |
| 2001-11-16 | A.PE |
Preliminary Amendment | 4 | View | |
| 2001-11-16 | SPEC |
Specification | 15 | View | |
| 2001-11-16 | CLM |
Claims | 4 | View | |
| 2001-11-16 | ABST |
Abstract | 1 | View | |
| 2001-11-16 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-11-16 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
118/313
B05C11/1013
G05D16/2013
Y10T137/0379
Y10T137/2409
Y10T137/776
B05C5/02
B05C11/1026
G03F7/16
G05D16/2026
Prosecution
- Examiner
- LORENGO, JERRY A
- Art Unit
- 1734
- Docket No.
- MCA-429DIV
- Confirmation No.
- 4177
Publication
- Pub. No.
- US20020029740A1
- Pub. Date
- 2002-03-14
Patent Term Adjustment
-52days
Parent
is a Division of
→
App. 09/488,146
· US 6,348,098
Filed 2000-01-20
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/116,511
Filed 1999-01-20
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/143,370
Filed 1999-07-12
· Provisional Application Expired
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
RELEASE OF SECURITY INTEREST
Recorded 2011-08-17
from
ENTEGRIS, INC.
SECURITY AGREEMENT
Recorded 2009-03-09
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Quick Facts
- Patent No.
- US 6,527,862
- App. No.
- 09/991,392
- Filed
- 2001-11-16
- Granted
- 2003-03-04
- Pub. No.
- US20020029740A1
- Examiner
- LORENGO, JERRY A
- Art Unit
- 1734
- PTA
- -52 days
External Links