Resist resins, chemically amplified resist composition, and process for the formation of a pattern

Inventor: Mitsuharu Yamana

Abandoned -- Failure to Respond to an Office Action View Publication ↗

	Code	Description	Pages	PDF
2001-11-26	`TRNA`	Transmittal of New Application	2	View
2001-11-26	`ADS`	Application Data Sheet	1	View
2001-11-26	`A.PE`	Preliminary Amendment	5	View
2001-11-26	`SPEC`	Specification	27	View
2001-11-26	`CLM`	Claims	7	View
2001-11-26	`ABST`	Abstract	1	View
2001-11-26	`OATH`	Oath or Declaration filed	2	View

Inventors

Mitsuharu Yamana Tokyo, JAPAN

Attorneys & Agents of Record

ROBERT HARGEST Reg. 25590 Attorney · YOUNG AND THOMPSON

ANDREW PATCH Reg. 32925 Attorney · YOUNG & THOMPSON

ERIC JENSEN Reg. 37855 Attorney · IP&T GROUP LLP

THOMAS PERKINS Reg. 33027 Attorney · YOUNG & THOMPSON

BENOIT CASTEL Reg. 35041 Attorney

ROBERT PATCH Reg. 17355 Attorney · YOUNG AND THOMPSON

JEFFRY NELSON Reg. 30481 Attorney · NIXON & VANDERHYE, P.C.

RAYMOND MAH Reg. 41426 Attorney · NIXON & VANDERHYE, P.C.

ROLAND LONG Reg. 41949 Attorney · YOUNG AND THOMPSON

LARS GENIESER Reg. 46722 Attorney · NIXON & VANDERHYE P.C.

JEFFREY GOEHRING Reg. 52948 Attorney · NIXON & VANDERHYE

KARI FOOTLAND Reg. 55187 Attorney · YOUNG & THOMPSON

MIKLOS GASZNER Reg. 61314 Attorney · NIXON & VANDERHYE P.C.

Classification

USPC 430/270.1

Prosecution

Foreign Priority

2000-357781 · 2000-11-24 · JAPAN

Publication

NEC ELECTRONICS CORPORATION

from NEC CORPORATION

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2003-05-02

NEC CORPORATION

from YAMANA, MITSUHARU

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2001-11-26

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