Granted Patent
Utility
US 6,605,816
· Confirmation No. 2152
RETICLE AND DIRECT LITHOGRAPHY WRITING STRATEGY
Inventor:
Torbjorn Sandstrom
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-11-16 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-11-16 | A.PE |
Preliminary Amendment | 4 | View | |
| 2001-11-16 | SPEC |
Specification | 25 | View | |
| 2001-11-16 | CLM |
Claims | 9 | View | |
| 2001-11-16 | ABST |
Abstract | 1 | View | |
| 2001-11-16 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-11-16 | OATH |
Oath or Declaration filed | 8 | View |
Inventors
Torbjorn Sandstrom
Pixbo, SWEDEN
Attorneys & Agents of Record
Classification
USPC
250/492.22
G03F1/62
G03F7/2053
G03F1/26
G03F1/34
G03F1/38
G03F1/68
G03F1/78
G03F7/094
G03F7/2063
Y10S430/143
Prosecution
- Examiner
- SMITH, JOHNNIE L
- Art Unit
- 2881
- Customer No.
- 22470
- Docket No.
- MLSE 1000-3
- Confirmation No.
- 2152
Publication
- Pub. No.
- US20020125443A1
- Pub. Date
- 2002-09-12
Patent Term Adjustment
0days
TERMINATION OF LICENSE AGREEMENT
Recorded 2009-07-08
RELEASE OF PATENT PLEDGE AGREEMENT
Recorded 2009-07-08
RELEASE OF PATENT PLEDGE AGREEMENT
Recorded 2009-06-17
RELEASE OF LICENSE AGREEMENT
Recorded 2009-06-17
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Quick Facts
- Patent No.
- US 6,605,816
- App. No.
- 09/992,653
- Filed
- 2001-11-16
- Granted
- 2003-08-12
- Pub. No.
- US20020125443A1
- Examiner
- SMITH, JOHNNIE L
- Art Unit
- 2881
- PTA
- 0 days
External Links