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App. No. 09/992,743 · Confirmation No. 9896

LOW TEMPERATURE ALUMINUM PLANARIZATION PROCESS

Inventor: Ende Shan
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-04-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-02 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-02-02 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-02-02 1449 List of References cited by applicant and considered by examiner 1 View
2004-02-02 CLM Claims 7 View
2004-02-02 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-02 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-14 WFEE Fee Worksheet (SB06) 1 View
2003-10-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-10-20 SPEC Specification 1 View
2003-10-20 CLM Claims 7 View
2003-10-20 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-10-20 XT/ Extension of Time 1 View
2003-10-20 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-06-18 CTNF Non-Final Rejection 9 View
2003-06-03 RCEX Request for Continued Examination (RCE) 3 View
2003-06-03 XT/ Extension of Time 2 View
2003-05-21 CTAV Advisory Action (PTOL-303) 3 View
2003-04-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-04-22 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-04-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-04-07 CLM Claims 6 View
2003-04-07 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-04-07 XT/ Extension of Time 2 View
2002-11-29 CTFR Final Rejection 6 View
2002-11-29 892 List of references cited by examiner 1 View
2002-09-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2002-09-23 CLM Claims 5 View
2002-09-23 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2002-08-06 C.AD Change of Address 1 View
2002-06-19 CTNF Non-Final Rejection 5 View
2002-06-19 892 List of references cited by examiner 1 View
2002-06-19 1449 List of References cited by applicant and considered by examiner 1 View
2002-02-25 LET. Miscellaneous Incoming Letter 2 View
2002-02-25 OATH Oath or Declaration filed 2 View
2002-01-09 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-01-09 FOR Foreign Reference 25 View
2001-12-14 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-11-14 TRNA Transmittal of New Application 3 View
2001-11-14 SPEC Specification 11 View
2001-11-14 CLM Claims 6 View
2001-11-14 ABST Abstract 1 View
2001-11-14 DRW Drawings-only black and white line drawings 3 View
2001-11-14 OATH Oath or Declaration filed 2 View
2001-11-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-11-14 FWCLM Index of Claims 1 View
2001-11-14 SRFW Search information including classification, databases and other search related notes 1 View
2001-11-14 TRNA Transmittal of New Application 3 View
2001-11-14 DRW Drawings-only black and white line drawings 3 View
2001-11-14 SPEC Specification 11 View
2001-11-14 CLM Claims 6 View
2001-11-14 ABST Abstract 1 View
2001-11-14 OATH Oath or Declaration filed 2 View
2001-11-14 WCLM Claims Worksheet (PTO-2022) 1 View
2001-11-14 WFEE Fee Worksheet (SB06) 1 View
2001-11-14 WFEE Fee Worksheet (SB06) 2 View
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Quick Facts
App. No.
09/992,743
Filed
2001-11-14
Granted
2004-06-08
Pub. No.
US20030092255A1
Art Unit
2814
PTA
-135 days