IP Library Granted Patent US 6,488,566
Granted Patent Utility
US 6,488,566 · Confirmation No. 1380

SYSTEM FOR REAL-TIME CONTROL OF SEMICONDUCTOR WAFER POLISHING

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Code Description Pages PDF
2001-11-14 TRNA Transmittal of New Application 2 View
2001-11-14 A.PE Preliminary Amendment 23 View
2001-11-14 SPEC Specification 34 View
2001-11-14 CLM Claims 16 View
2001-11-14 ABST Abstract 1 View
2001-11-14 DRW Drawings-only black and white line drawings 15 View
2001-11-14 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,488,566
App. No.
09/993,010
Filed
2001-11-14
Granted
2002-12-03
Pub. No.
US20020034922A1
Art Unit
3724
PTA
0 days