IP Library Patent Application 10299271
Patent Application Utility
App. No. 10/299,271 · Confirmation No. 5904

SYSTEM FOR REAL-TIME CONTROL OF SEMICONDUCTOR WAFER POLISHING

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2004-04-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-11-19 TRNA Transmittal of New Application 3 View
2002-11-19 A.PE Preliminary Amendment 27 View
2002-11-19 SPEC Specification 34 View
2002-11-19 CLM Claims 16 View
2002-11-19 ABST Abstract 1 View
2002-11-19 DRW Drawings-only black and white line drawings 15 View
2002-11-19 OATH Oath or Declaration filed 6 View
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Quick Facts
App. No.
10/299,271
Filed
2002-11-19
Granted
2004-05-25
Pub. No.
US20030073384A1
Art Unit
3724
PTA
0 days