Patent Application
Utility
App. No. 10/299,271
· Confirmation No. 5904
SYSTEM FOR REAL-TIME CONTROL OF SEMICONDUCTOR WAFER POLISHING
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-04-15 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-11-19 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-11-19 | A.PE |
Preliminary Amendment | 27 | View | |
| 2002-11-19 | SPEC |
Specification | 34 | View | |
| 2002-11-19 | CLM |
Claims | 16 | View | |
| 2002-11-19 | ABST |
Abstract | 1 | View | |
| 2002-11-19 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2002-11-19 | OATH |
Oath or Declaration filed | 6 | View |
Inventors
Gurtej S. Sandhu
Boise, ID
Trung Tri Doan
Boise, ID
Attorneys & Agents of Record
Classification
USPC
451/5
B24B37/107
B23Q15/013
B23Q15/12
B24B13/015
B24B37/013
B24B37/015
B24B37/12
B24B37/205
B24B49/003
B24B49/02
B24B49/04
B24B49/10
B24B49/12
B24B57/02
G05B19/404
G05B2219/34403
G05B2219/37398
G05B2219/37602
G05B2219/45026
G05B2219/45199
G05B2219/45232
G05B2219/49052
G05B2219/49057
Prosecution
- Examiner
- ELEY, TIMOTHY V
- Art Unit
- 3724
- Customer No.
- 21567
- Docket No.
- MI22-2172
- Confirmation No.
- 5904
Publication
- Pub. No.
- US20030073384A1
- Pub. Date
- 2003-04-17
Patent Term Adjustment
0days
Parent
is a Continuation of
→
App. 09/993,010
· US 6,488,566
Filed 2001-11-14
· Patented Case
Parent
is a Division of
→
App. 09/838,298
· US 6,464,564
Filed 2001-04-18
· Patented Case
Parent
is a Division of
→
App. 09/444,022
· US 6,306,009
Filed 1999-11-19
· Patented Case
Parent
is a Continuation of
→
App. 09/181,433
· US 6,120,347
Filed 1998-10-28
· Patented Case
Parent
is a Continuation of
→
App. 08/907,389
· US 5,851,135
Filed 1997-08-07
· Patented Case
Parent
is a Continuation of
→
App. 08/547,529
· US 5,700,180
Filed 1995-10-24
· Patented Case
Parent
is a Continuation in-part of
→
App. 08/112,759
· US 5,486,129
Filed 1993-08-25
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- App. No.
- 10/299,271
- Filed
- 2002-11-19
- Granted
- 2004-05-25
- Pub. No.
- US20030073384A1
- Examiner
- ELEY, TIMOTHY V
- Art Unit
- 3724
- PTA
- 0 days
External Links