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App. No. 09/996,215 · Confirmation No. 1210

METHOD OF FORMING A SEMICONDUCTOR DEVICE USING A CARBON DOPED OXIDE LAYER TO CONTROL THE CHEMICAL MECHANICAL POLISHING OF A DIELECTRIC LAYER

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2009-04-07 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-03-12 PA.. Power of Attorney 2 View
2008-03-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-11-20 TRNA Transmittal of New Application 4 View
2001-11-20 SPEC Specification 18 View
2001-11-20 CLM Claims 5 View
2001-11-20 ABST Abstract 1 View
2001-11-20 DRW Drawings-only black and white line drawings 3 View
2001-11-20 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
09/996,215
Filed
2001-11-20
Granted
2003-04-15
Art Unit
2813
PTA
-87 days