IP Library › Granted Patent US 6,630,390
Granted Patent Utility
US 6,630,390 · Confirmation No. 4570

METHOD OF FORMING A SEMICONDUCTOR DEVICE USING A CARBON DOPED OXIDE LAYER TO CONTROL THE CHEMICAL MECHANICAL POLISHING OF A DIELECTRIC LAYER

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2009-04-07 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-03-12 PA.. Power of Attorney 2 View
2008-03-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-07-24 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-01-29 TRNA Transmittal of New Application 7 View
2003-01-29 A.PE Preliminary Amendment 2 View
2003-01-29 SPEC Specification 18 View
2003-01-29 CLM Claims 5 View
2003-01-29 ABST Abstract 1 View
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2003-01-29 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,630,390
App. No.
10/354,361
Filed
2003-01-29
Granted
2003-10-07
Pub. No.
US20030139051A1
Art Unit
2813
PTA
0 days