IP Library › Granted Patent US 6,569,701
Granted Patent Utility
US 6,569,701 · Confirmation No. 2763

METHOD FOR FABRICATING AN ISOLATED MICROELECTROMECHANICAL SYSTEM DEVICE

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-10-25 TRNA Transmittal of New Application 2 View
2001-10-25 SPEC Specification 9 View
2001-10-25 CLM Claims 2 View
2001-10-25 ABST Abstract 1 View
2001-10-25 DRW Drawings-only black and white line drawings 3 View
2001-10-25 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,569,701
App. No.
10/002,725
Filed
2001-10-25
Granted
2003-05-27
Pub. No.
US20030082928A1
Art Unit
2829
PTA
-120 days