Granted Patent
Utility
US 6,660,700
· Confirmation No. 8329
FORMULATIONS INCLUDING A 1,3-DICARBONYL COMPOUND CHELATING AGENT AND COPPER CORROSION INHIBITING AGENTS FOR STRIPPING RESIDUES FROM SEMICONDUCTOR SUBSTRATES CONTAINING COPPER STRUCTURES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-09 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2003-08-29 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2003-08-29 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-11-15 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-11-15 | SPEC |
Specification | 12 | View | |
| 2001-11-15 | CLM |
Claims | 6 | View | |
| 2001-11-15 | ABST |
Abstract | 1 | View | |
| 2001-11-15 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-11-15 | OATH |
Oath or Declaration filed | 5 | View | |
| 2001-11-15 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
William A. Wojtczak
Santa Clara, CA
Ma. Fatima Seijo
Hayward, CA
David Bernhard
Dallas, TX
Long Nguyen
San Jose, CA
Attorneys & Agents of Record
Classification
USPC
510/175
H10P70/273
C11D1/00
C11D2111/22
H10P50/287
H10P70/15
H10P70/234
C11D3/2072
C11D7/02
C11D7/261
C11D7/264
C11D7/265
C11D7/266
C11D7/32
C11D7/3209
C11D7/3218
C11D7/3245
C11D7/3263
C11D7/3272
C11D7/3281
C11D7/34
C11D7/5009
C11D7/5013
C23G5/02
G03F7/425
Prosecution
- Examiner
- WEBB, GREGORY E
- Art Unit
- 1751
- Customer No.
- 25559
- Docket No.
- 395-CIP-DIV
- Confirmation No.
- 8329
Publication
- Pub. No.
- US20020065204A1
- Pub. Date
- 2002-05-30
Patent Term Adjustment
0days
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-12-19
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
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Quick Facts
- Patent No.
- US 6,660,700
- App. No.
- 10/003,373
- Filed
- 2001-11-15
- Granted
- 2003-12-09
- Pub. No.
- US20020065204A1
- Examiner
- WEBB, GREGORY E
- Art Unit
- 1751
- PTA
- 0 days
External Links