IP Library › Granted Patent US 6,763,514
Granted Patent Utility
US 6,763,514 · Confirmation No. 7485

METHOD AND APPARATUS FOR CONTROLLING RIPPLING DURING OPTICAL PROXIMITY CORRECTION

Inventor: Youping Zhang
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2002-07-15 FOR Foreign Reference 39 View
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Quick Facts
Patent No.
US 6,763,514
App. No.
10/016,837
Filed
2001-12-12
Granted
2004-07-13
Pub. No.
US20030110465A1
Art Unit
2825
PTA
0 days