IP Library Granted Patent US 6,530,826
Granted Patent Utility
US 6,530,826 · Confirmation No. 8573

PROCESS FOR THE SURFACE POLISHING OF SILICON WAFERS

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Code Description Pages PDF
2006-09-11 PA.. Power of Attorney 4 View
2001-10-30 TRNA Transmittal of New Application 1 View
2001-10-30 SPEC Specification 28 View
2001-10-30 CLM Claims 5 View
2001-10-30 ABST Abstract 1 View
2001-10-30 DRW Drawings-only black and white line drawings 2 View
2001-10-30 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,530,826
App. No.
10/021,515
Filed
2001-10-30
Granted
2003-03-11
Pub. No.
US20020077039A1
Art Unit
3723
PTA
-4 days