IP Library Granted Patent US 7,024,031
Granted Patent B1
US 7,024,031 · App. 10/035,592 · Granted Apr 4, 2006

System and method for inspection using off-angle lighting

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Quick Facts
Patent No.
US 7,024,031
App. No.
10/035,592
Granted
Apr 4, 2006
Kind
B1
Abstract

A system for inspecting components is provided. The system includes an axial lighting system that illuminates the component with axial lighting to allow one or more features of the component to be located, such as by causing protruding features to be brighter than the background and recessed features to be darker than the background. An off-axis lighting system illuminates the component with off-axis lighting in the absence of the axial lighting to allow the component to be inspected to locate one or more features, such as a bump contact.

Claims (39)

1. A system for inspecting components comprising:

an axial lighting system illuminating the component with axial lighting to allow one or more features of the component to be located;

an off-axis lighting system illuminating the component with off-axis lighting in the absence of the axial lighting to allow the component to be inspected to locate one or more features;

an image analysis system receiving image data of the component and analyzing the image data utilizing gradient processing to compare a first gradient value to a second gradient value to locate the one or more features.

2. The system of claim 1 , wherein the image analysis system analyzes a single set of the image data to locate the one or more features.

3. The system of claim 2 wherein the image analysis system further comprises a feature locator system receiving the image data and generating feature edge data.

4. The system of claim 2 wherein the image analysis system further comprises a defect locator system receiving the image data and generating defect indication data from the pixel data.

5. The system of claim 2 wherein the image analysis system further comprises a protrusion analysis system receiving the image data and generating projection size data.

6. The system of claim 2 wherein the image analysis system further comprises a recess analysis system receiving the image data and generating recess analysis data.

7. The system of claim 2 wherein the image analysis system further comprises a missing feature system receiving image data and generating missing feature data.

8. The system of claim 2 wherein the image data further comprises pixel data.

9. A system for inspecting components comprising:

an off-axis lighting system illuminating the component with off-axis lighting to allow the component to be inspected to locate one or more features corresponding to a plane of reference, one or more features extending above the plane of reference, and one or more features extending below the plane of reference; and

an image analysis system receiving image data of the component generated when the component is being illuminated with the off-axis lighting and analyzing at least three relative maxima of histogram data generated from the image data to locate the one or more features, respectively.

10. The system of claim 9 wherein the image analysis system further comprises a feature locator system receiving the image data and generating feature edge data.

11. The system of claim 9 wherein the image analysis system further comprises a defect locator system receiving the image data and generating defect indication data from the image data.

12. A method for inspecting a component comprising:

illuminating the component with off-angle lighting to increase the visibility of one or more types of features;

generating image data of the component; and

analyzing at least three relative maxima of histogram data generated with the image data to determine whether any of the one or more types of features are present.

13. The method of claim 12 wherein illuminating the component with the off-angle lighting comprises illuminating the component with a circular xenon flash lamp.

14. The method of claim 12 wherein generating the image data of the component comprises generating an N×M array of pixel data.

15. The method of claim 12 wherein analyzing the image data to determine whether any of the one or more types of features are present comprises analyzing the image data to determine whether a protrusion is present.

16. The method of claim 12 wherein analyzing the image data to determine whether any of the one or more types of features are present comprises analyzing the image data to determine whether a recess is present.

17. The method of claim 12 wherein analyzing the image data to determine whether any of the one or more types of features are present comprises analyzing the image data to determine whether a feature is missing.

18. The method of claim 12 wherein analyzing the image data to determine whether any of the one or more types of features are present comprises generating the histogram data from a single set of image data and determining whether the histogram data indicates that a feature is present.

19. The method of claim 12 wherein analyzing the image data to determine whether any of the one or more types of features are present comprises generating the histogram data from a single set of image data and determining whether the histogram data indicates that a recess is present.

20. The method of claim 12 wherein analyzing the image data to determine whether any of the one or more types of features are present comprises generating the histogram data from a single set of image data and determining whether the histogram data indicates that a protrusion is present.

21. A system for inspecting components comprising:

an axial lighting system illuminating the component with axial lighting to allow one or more features of the component to be located;

an off-axis lighting system illuminating the component with off-axis lighting to allow the component to be inspected to locate one or more features; and

a dual lighting analysis system analyzing image data of the component created when the axial lighting system and the off-axis lighting system are simultaneously illuminating the component and generating component acceptance data.

22. The system of claim 21 wherein the dual lighting analysis system further comprises a band analysis system receiving edge data and generating band data.

23. The system of claim 21 wherein the dual lighting analysis system further comprises an edge location system receiving pixel data and generating edge data.

24. The system of claim 21 wherein the dual lighting analysis system further comprises a feature analysis system receiving band data and determining whether a feature is present.

25. A system for inspecting components comprising:

an axial lighting system illuminating a component with axial lighting to allow one or more features of the component to be located;

an off-axis lighting system illuminating the component with off-axis lighting in the absence of the axial lighting to allow the component to be inspected to locate one or more features of the component; and

a band analysis system receiving image data of the component and analyzing the image data to identify two or more edges to determine whether a band between the two or more edges identifies the one or more features.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2020
From: RUDOLPH TECHNOLOGIES, INC.
To: ONTO INNOVATION INC.
Reel/Frame 053117/0623 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 20, 2012
From: AUGUST TECHNOLOGY CORPORATION
To: RUDOLPH TECHNOLOGIES, INC.
Reel/Frame 029583/0982 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 12, 2012
From: SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS
To: AUGUST TECHNOLOGY CORPORATION
Reel/Frame 029453/0079 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 5, 2002
From: CASTELLANOS, RAMIRO NOLASCO; MATHUR, SANJEEV (NMI); THORNELL, JOHN MARK; CARRINGTON, THOMAS CASEY; SIM, HAK CHUAH; GUEST, CLYDE MAXWELL; HARRIS, CHARLES K.
To: SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS, INC.
Reel/Frame 012659/0131 →