IP Library › Granted Patent US 6,653,030
Granted Patent Utility
US 6,653,030 · Confirmation No. 5805

OPTICAL-MECHANICAL FEATURE FABRICATION DURING MANUFACTURE OF SEMICONDUCTORS AND OTHER MICRO-DEVICES AND NANO-DEVICES THAT INCLUDE MICRON AND SUB-MICRON FEATURES

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 Code Description Pages PDF
2014-09-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-09-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-09-10 PA.. Power of Attorney 1 View
2014-09-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-09-10 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2003-08-26 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-04-22 TRNA Transmittal of New Application 1 View
2002-04-22 DRW Drawings-only black and white line drawings 11 View
2002-01-23 TRNA Transmittal of New Application 1 View
2002-01-23 SPEC Specification 13 View
2002-01-23 CLM Claims 3 View
2002-01-23 ABST Abstract 1 View
2002-01-23 DRW Drawings-only black and white line drawings 12 View
2002-01-23 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,653,030
App. No.
10/058,744
Filed
2002-01-23
Granted
2003-11-25
Pub. No.
US20030138704A1
Art Unit
1756
PTA
-5 days