IP Library › Granted Patent US 6,652,718
Granted Patent Utility
US 6,652,718 · Confirmation No. 8191

USE OF RF BIASED ESC TO INFLUENCE THE FILM PROPERTIES OF TI AND TIN

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2011-02-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-02-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-01-24 PA.. Power of Attorney 1 View
2011-01-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-07-14 C.AD Change of Address 1 View
2010-07-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-08-14 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-17 A.NE Response After Final Action 1 View
2003-07-17 SPEC Specification 11 View
2003-07-17 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-07-17 LET. Miscellaneous Incoming Letter 1 View
2003-07-17 DRW Drawings-only black and white line drawings 14 View
2002-01-30 TRNA Transmittal of New Application 5 View
2002-01-30 ADS Application Data Sheet 2 View
2002-01-30 SPEC Specification 31 View
2002-01-30 CLM Claims 4 View
2002-01-30 ABST Abstract 1 View
2002-01-30 DRW Drawings-only black and white line drawings 15 View
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Quick Facts
Patent No.
US 6,652,718
App. No.
10/060,724
Filed
2002-01-30
Granted
2003-11-25
Art Unit
1753
PTA
-86 days