IP Library › Patent Application 60265428
Patent Application Provisional
App. No. 60/265,428 · Confirmation No. 2792

Use of RF biased ESC to influence the film properties of Ti and TiN

Provisional Application Expired
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 Code Description Pages PDF
2001-01-30 TRNA Transmittal of New Application 2 View
2001-01-30 SPEC Specification 15 View
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Quick Facts
App. No.
60/265,428
Filed
2001-01-30