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App. No. 10/062,505 · Confirmation No. 2766

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING ETCHING OF A PERIPHERAL AREA BEFORE CHEMICAL-MECHANICAL POLISHING

Inventor: Hiroyuki Kawano
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-05-28 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-03-02 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-03-02 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-03-02 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-11 SRNT Examiner's search strategy and results 1 View
2003-12-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-12-15 CLM Claims 4 View
2003-12-15 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-09-18 CTNF Non-Final Rejection 7 View
2003-09-18 892 List of references cited by examiner 1 View
2003-08-27 SRNT Examiner's search strategy and results 1 View
2003-07-16 ELC. Response to Election / Restriction Filed 1 View
2003-06-17 CTRS Requirement for Restriction/Election 5 View
2002-02-05 TRNA Transmittal of New Application 4 View
2002-02-05 SPEC Specification 16 View
2002-02-05 CLM Claims 2 View
2002-02-05 ABST Abstract 1 View
2002-02-05 DRW Drawings-only black and white line drawings 8 View
2002-02-05 OATH Oath or Declaration filed 3 View
2002-02-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-02-05 SRFW Search information including classification, databases and other search related notes 1 View
2002-02-05 FWCLM Index of Claims 1 View
2002-02-05 TRNA Transmittal of New Application 4 View
2002-02-05 DRW Drawings-only black and white line drawings 8 View
2002-02-05 SPEC Specification 16 View
2002-02-05 CLM Claims 2 View
2002-02-05 ABST Abstract 1 View
2002-02-05 OATH Oath or Declaration filed 3 View
2002-02-05 WFEE Fee Worksheet (SB06) 1 View
2002-02-05 WFEE Fee Worksheet (SB06) 1 View
2002-02-05 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-05 FRPR Certified Copy of Foreign Priority Application 32 View
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Quick Facts
App. No.
10/062,505
Filed
2002-02-05
Granted
2004-07-06
Pub. No.
US20020127870A1
Art Unit
2829
PTA
0 days