IP Library › Granted Patent US 6,821,825
Granted Patent Utility
US 6,821,825 · Confirmation No. 6553

PROCESS FOR DEPOSITION OF SEMICONDUCTOR FILMS

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2007-06-11 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2006-12-12 COCOUT Certificate of Correction - Post Issue Communication 1 View
2006-10-24 COCOUT Certificate of Correction - Post Issue Communication 1 View
2006-09-29 COCIN Request for Certificate of Correction 2 View
2005-12-08 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-10-18 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-08-12 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-12 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-08-12 1449 List of References cited by applicant and considered by examiner 8 View
2004-08-12 892 List of references cited by examiner 1 View
2004-08-12 FOR Foreign Reference 9 View
2004-08-12 FOR Foreign Reference 10 View
2004-08-12 FOR Foreign Reference 9 View
2004-08-12 CLM Claims 8 View
2004-08-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-12 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-12 BIB Bibliographic Data Sheet 1 View
2004-07-26 SRNT Examiner's search strategy and results 2 View
2004-06-15 ELC. Response to Election / Restriction Filed 1 View
2004-06-15 CLM Claims 1 View
2004-06-15 LET. Miscellaneous Incoming Letter 1 View
2004-06-15 WFEE Fee Worksheet (SB06) 1 View
2004-05-18 CTRS Requirement for Restriction/Election 6 View
2004-04-09 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-12-17 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-10-20 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-08-22 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-08-22 FOR Foreign Reference 1 View
2003-08-22 FOR Foreign Reference 14 View
2003-08-22 FOR Foreign Reference 30 View
2003-08-22 FOR Foreign Reference 110 View
2003-08-22 FOR Foreign Reference 46 View
2003-08-22 FOR Foreign Reference 32 View
2003-05-09 LET. Miscellaneous Incoming Letter 1 View
2003-05-09 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-12-02 LET. Miscellaneous Incoming Letter 1 View
2002-12-02 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-05-24 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2002-05-24 OATH Oath or Declaration filed 4 View
2002-05-24 PA.. Power of Attorney 2 View
2002-05-13 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2002-05-13 FOR Foreign Reference 2 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 2 View
2002-05-13 FOR Foreign Reference 2 View
2002-05-13 FOR Foreign Reference 2 View
2002-05-13 FOR Foreign Reference 2 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 4 View
2002-05-13 FOR Foreign Reference 7 View
2002-05-13 FOR Foreign Reference 8 View
2002-05-13 FOR Foreign Reference 3 View
2002-05-13 FOR Foreign Reference 5 View
2002-05-13 FOR Foreign Reference 12 View
2002-05-13 FOR Foreign Reference 8 View
2002-04-16 PEFN Pre-Exam Formalities Notice 1 View
2002-04-15 LET. Miscellaneous Incoming Letter 1 View
2002-04-15 A.PE Preliminary Amendment 1 View
2002-04-15 CLM Claims 3 View
2002-04-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2002-02-11 TRNA Transmittal of New Application 3 View
2002-02-11 SPEC Specification 33 View
2002-02-11 CLM Claims 8 View
2002-02-11 ABST Abstract 1 View
2002-02-11 DRW Drawings-only black and white line drawings 3 View
2002-02-11 SPEC Specification 20 View
2002-02-11 IMIS Miscellaneous Internal Document 35 View
2002-02-11 CLM Claims 8 View
2002-02-11 371P Documents submitted with 371 (National Stage) Applications 24 View
2002-02-11 WFEE Fee Worksheet (SB06) 1 View
2002-02-11 WFEE Fee Worksheet (SB06) 1 View
2002-02-11 WCLM Claims Worksheet (PTO-2022) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,821,825
App. No.
10/074,563
Filed
2002-02-11
Granted
2004-11-23
Pub. No.
US20030082300A1
Art Unit
1762
PTA
0 days